Effect of Thickness on Conductivity of (ZnO:AlCl2) TCO Thin Film. JST (Jurnal Sains Terapan), [S. l.], v. 7, n. 2, p. 1–6, 2021. DOI: 10.32487/jst.v7i1.1134. Disponível em: http://jurnal.poltekba.ac.id/index.php/jst/article/view/1134. Acesso em: 6 nov. 2026.