Effect of Thickness on Conductivity of (ZnO:AlCl2) TCO Thin Film
Abstract
Massive materials engineering has been carried out to get a certain function of a material. One of the intensively carried out researches in the development of conductive glass as the base material for solar cells. based on these facts, this research was conducted to develop a functional material. (ZnO:AlCl2) TCO thin film has been deposited on a glass substrate using DC sputtering technique. The objective of this research is to study the effect of time deposition, the distance of substrate, morphology of surface, and microstructure (ZnO: AlCl2) thin film, so that it can be used as a component in the solar cell. The characterization has been performed with Scanning Electron Microscopy to investigate the surface morphology and the electrical resistivity was done by doing the four-point probe method. The result showed that long deposition causes the layers on the substrate to overheat so that the Zn deposition in the layer is oxidized. The thickness of the layers increases followed by the resistivity of the deposition layers.
Keyword: Thickness, Conductivity, Thin Film.
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Liu, Yufang Li, et al, "ZnO-Based Transparent Conductive Thin Films: Doping Performance, and Proceessing", Hindawi Publishing Corporation Journal of Nanomaterials. Vol. 2013, pp. 1-7, 2013. DOI: http://dx.doi.org/10.1155/2013/196521.
Wen-Jauh Chen, Wei Long Liu, et al. "Synthesis of ZnO:Al Transparent Conductive Thin Films Using Sol-gel Method", Vol. 2012, pp. 2, 2012. DOI: http://dx.doi.org/10.1016/j.proeng.2012.03.010.
Sudjatmoko, Suryadi, et al. "Preparation and Characterization of Transparent Conductive ZnO Thin Films by DC Magnetron Sputtering", Vol. V, pp. 1, 2002. DOI: http://dx.doi.org/10.17146/gnd.2002.5.1.212.
Huajing Zheng, Chi Zhang, et al. "Optimization in Synthesis of ITO Thin Films Fabricated by DC Magnetron Sputtering Method", Vol. 575, pp. 1, 2014. DOI: http://10.4028/www.scientific.net/AMM.575.254.
S. Agrawal, R. Rane, et al. "ZnO Thin Film Deposition for TCO Application in Solar Cell", Vol. 2013. DOI: http://dx.doi.org/10.1155/2013/718692.
P. Asanithi, S. Chaiyakun, et al. "Growth of Silver Nanoparticles by DC Magnetron Sputtering", Vol. 2012. DOI: http://dx.doi.org/10.1155/2012/963609.
Dong-Joo, Kwak., Moon Byung-Ho, Lee Don-Kyu, Park Cha-Soo, and Sung Youl-Moon. “Comparison of Transparent Conductive Indium Tin Oxide, Ttitanium-doped Indium Oxide, and Fluorine-doped Tin Oxide Films for Dye-Sensitized Solar Cell Application”, Journal of Electrical Engineering & Technology Vol. 6, No. 5, pp.. 1-4, 2011.
Arini, Tri., Latifa Hanum Lalasari, Akhmad Herman Yuwono, F. Firdiyono, Lia Andriyah, dan Achmad Subhan. “Pengaruh Waktu Deposisi Dan Temperatur Substrat Terhadap Pembuatan Kaca Konduktif FTO (Fluorine-Doped Tin Oxide)”, Metalurgi, Vol. 32, pp. 1-8, 2017
Jiang, Zhao., Ni Jiamiao, Zhao Xiujian, dan Xiong Yuli. “Preparation and Characterization of Transparent Conductive Zinc Doped Tin Oxide Thin Films Prepared by Radio-frequency Magnetron Sputtering”, Journal of Wuhan University of Technology-Mater, Vol. 26, No.3, pp. 1-6, 2011.
Kumar, M. Melvin David., Yun Ju-Hyung, dan Kim Joondong, “Metal/Semiconductor and Transparent Conductor/Semiconductor Heterojunctions in High Efficient Photoelectric Devices: Progress and Features”. International Journal of Photoenergy, Vol. 2014, pp. 3.
Stadler, Andreas. “Transparent Conducting Oxides—An Up-To-Date Overview”, Materials, Vol. 5, 661-683, pp. 1-4, 2012.
Zhuo, Chen., Kai Shum, T. Salagaj, Wei Zhang, dan K. Strobl, “ZnO Thin Films Synthesized by Chemical Vapor Deposition”, IEEE Xplore, pp. 1-7, 2010.
Dawood, Yasmeen Z., Majid H. Hassoni, dan Mohamad S. Mohamad. “Effect of Solution Concentration on Some Optical Properties of Indium Oxide Doped with SnO2 Thin Films Prepared by Chemical Spray Pyrolisis Technique”, International Journal of Pure and Applied Physics, Vol. 2, No. 1, pp. 1-6, 2014.
Khan, M.I., K.A. Bhatti, Rabia Qindeel, Norah Alonizan, dan Hayat Saeed Althobaiti. “Characterizations of Multilayer ZnO Thin Films Deposited by Sol-Gel Spin Coating Technique”, Result in Physics No.5, pp. 1-5, 2016.
Gobbi, Angelo .L. dan Pedro A.P. Nascente. “D.C. Sputtering”, Encyclopedia of Tribology, pp. 700-706, 2013.
Jayathilake, DSY. dan Nirmal Peiris TA. “Overview on Transparent Conducting Oxides and State of the Art of Low-cost Doped ZnO Systems”, SF Journal of Material and Chemical Engineering, Vol. 1, Edition (1): 1004, pp. 1-7, 2018.
Liu, Yanhui., Zhi Yan, dan Xiying Zhou. “Microstructure and Fracture Characteristic of Zinc Thin Film Deposited by Magnetron Sputtering on Brittle Substrate”, Journal of Advanced Microscopy Research, Vol. 8, pp. 1-4., 2013.
Yun, Tae Young, Park Soon Rok, Baek Ju Young, Han Hye Jin, Jeon Chan Wook. “Comparison of Aluminum Zinc Oxide and Indium Tin Oxide for Transparent Conductive Oxide layer in Cu(In,Ga)Se2 Solar Cell”, Molecular Crystals and Liquid Crystals, 586:1, 82-87, pp. 1-7, 2013.
Rwenyagila, Egidius Rutatizibwa., Benjamin Agyei-Tuffour, Martiale Gaetan, Zebaze Kana, Omololu Akin-Ojo, dan Winston Oluwole Soboyejoa. “Optical properties of ZnO/Al/ZnO multilayer films for large area transparent electrodes”, J. Mater. Res., Vol. 29, No. 24, pp. 1-9, 2014.
DOI: https://doi.org/10.32487/jst.v7i1.1134
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